T-shaped microcantilever sensor with reduced deflection offset
نویسندگان
چکیده
منابع مشابه
Modeling of T-Shaped Microcantilever Resonators
The extensive research and development of micromechanical resonators is trying to allow the use of these devices for highly sensitive applications. Microcantilevers are some of the simplest MEMS structure and had been proved to be a good platform due to its excellent mechanical properties. A cantilever working in dynamic mode, adjust its resonance frequency depending on changes in both, the spr...
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ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 2006
ISSN: 0003-6951,1077-3118
DOI: 10.1063/1.2345234